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¢Á Á¦Ç°Æ¯Â¡ Auto Sampling & Cartridge Sensor Type Portable Gas Detector
¢Á ±â¼úµ¥ÀÌÅÍ
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°¡½º¸í |
ÈÇÐ½Ä |
»ç¿ë¼¾¼ |
TWA |
RANGE |
ŸÀÔ |
Germane |
GeH4 |
SIH4 |
0.2ppm |
0-1ppm |
ÀϹÝÇü |
Silane |
SiH4 |
5ppm |
0-15ppm |
ÀϹÝÇü | |
Disilane |
Si2H6 |
• |
0-15ppm |
ÀϹÝÇü | |
Diborane |
B2H6 |
ASH3 |
0.1ppm |
0.0.3ppm |
ÀϹÝÇü |
Arsenic hydride |
AsH3 |
0.05ppm |
0-0.3ppm |
ÀϹÝÇü | |
Methylamine |
CH5N |
NH3 |
5ppm |
0-75ppm |
ÀϹÝÇü |
Di-Methylamine |
(CH3)2NH |
5ppm |
0-75ppm |
ÀϹÝÇü | |
Trimethylamine(TMA) |
C3H9N |
5ppm |
0-75ppm |
ÀϹÝÇü | |
Fluorine |
F2 |
F2 |
±¹³»:0.1ppm AGGIH:1ppm |
0-3ppm |
ÀϹÝÇü |
Phosgene |
COCI2 |
COCl2 |
0.1ppm |
0-1ppm |
ÀϹÝÇü |
Hydrogen fluoride |
HF |
HF |
0.5ppm |
0-9ppm |
ÀϹÝÇü |
Hydrogen bromide |
HBr |
2ppm |
0-9ppm |
ÀϹÝÇü | |
Silicon tetrafluoride |
SiF4 |
• |
0-9ppm |
ÀϹÝÇü | |
Trichlorosilane |
SiHCI3 |
HCl |
• |
0-15ppm |
ÀϹÝÇü |
Hydrogen chloride |
HCl |
1ppm |
0-15ppm |
ÀϹÝÇü | |
Dichlorosilane(DCS) |
SiH2Cl2 |
• |
0-15ppm |
ÀϹÝÇü | |
Methy bromide |
CH3Br |
¿ºÐÇØ+HF |
1ppm |
0-100ppm |
¿ºÐÇØÇü |
Methyl chloride |
CH3Cl |
¿ºÐÇØ+HCl |
50ppm |
0-2000ppm |
¿ºÐÇØÇü |
Hydrogen selenide |
H2Se |
HSE |
0.05ppm |
0-0.25ppm |
ÀϹÝÇü |
Hydrogen cyanide |
HCN |
HCN |
4.7ppm |
0-30ppm |
ÀϹÝÇü |
Sulfur dioxide |
SO2 |
SO2 |
2ppm |
0-10ppm |
ÀϹÝÇü |
Phosphine |
PH3 |
PH3 |
0.3ppm |
0-1ppm |
ÀϹÝÇü |
Hydrogen |
H2S |
H2S |
10ppm |
0-30ppm |
ÀϹÝÇü |
¡Ø »óÇ°»çÀÌÁî Ä¡¼ö´Â Àç´Â ¹æ¹ý°ú À§Ä¡¿¡ µû¶ó 1~3cm ¿ÀÂ÷°¡ ÀÖÀ» ¼ö ÀÖ½À´Ï´Ù.